Active Microvibration Control System Using Piezoelectric Actuator. 2nd Report, Development of Active 6 DOF Microvibration Control System.

Abstract

Microvibration control technology has been rapidly becoming important in a number of fields in cluding superfine technology in semiconductor manufacturing and microgravity research experiments in space. A piezoelectric actuator has recently attracted much interest in active vibration control because it has high displacement resolution, wide band characteristics, and leaks no magnetic flux. In the presented study, an active 6 DOF microvibration control system using a piezoelectric actuator was developed. A control law is adopted to provide almost the same performance as sky-hook systems by using only absolute acceleration, instead of achieving feedback of absolute displacement and velocity. Vibration control experiments were conducted, with satisfactory results in isolation performance against micro-ground motion, damping performance against direct disturbance, and control system robustness.