Abstract
In the present study, the effect of Al doping with 0.5 % Al (AZO-0.50), 1 % Al (AZO-1.00), and 1.5 % Al (AZO-1.50) have been successfully synthesized by Spray Pyrolysis method. The structural, optical and electrical properties of the obtained films was studied. The obtained films are characterized by different techniques such as X-ray diffraction (XRD), UV-visible and electrical Hall Effect measurements. The X-ray diffraction confirmed that the Al doping did not change the ZnO Hexagonal Wurtzite structure. Spectroscopic measurements in the UV-VIS-IR wavelength range were found to give good average transmittance values of about 73%, with a high transmittance of 75% with 0.5% Al doping. The optical gap value increases in the range of 3.23 to 3.26 eV with increasing aluminium content. The electrical analysis shows that the conductivity improved with doping compared to the pure ZnO film
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