Abstract
The effect of photon annealing on deformation in the crystal structure of boron doped Cz-Si wafers has been studied using triple crystal X-ray diffraction. Conventional annealing of the entire surface of double-side polished silicon wafers with halogen lamps (photon annealing mode) and rapid thermal annealing produce compression deformation. Annealing with special phototemplate providing for local annealing of multiple separated wafer areas (local photon annealing mode) at relatively low wafer temperatures (less than 55 °C) produces tensile deformation. This effect however is not observed if the reverse side of the annealed wafer contains a mechanical gettering layer. A mechanism explaining the experimental results has been suggested and can be used for the synthesis of charge pumps in photoelectric converter structures.
Highlights
Silicon wafer treatment in the so-called rapid thermal annealing (RTA) mode is becoming increasingly widely used due to the permanent increase in the size of wafers used for the fabrication of photoelectric converters
Photon annealing was implemented on a RTA instrument with halogen lamps
local photon annealing (LPA) was implemented using a metallic mask in the form of a 6 mm thick stainless steel plate having 1 × 1 mm2 holes with 3 mm spaces between them over the entire plate area
Summary
Silicon wafer treatment in the so-called rapid thermal annealing (RTA) mode is becoming increasingly widely used due to the permanent increase in the size of wafers used for the fabrication of photoelectric converters. The process combines relatively low price, simplicity and high adaptability. It can be successfully used for the synthesis of shallow p-n junctions in photoelectric converter structures [1, 2]. RTA is of great interest for researchers as a powerful tool in defect engineering. This primarily refers to annealing of radiation defects and impurity activation after ion implantation into silicon. The formation of thermal donors is sensitive to the presence of structural defects, gettering layers or inhomogeneities that produce stress
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