Abstract
Porous silicon (PS) is a nanostructured material based on silicon, fabricated using an electrochemical process that can be used for a broad spectrum of applications, from optoelectronic to biomedicine. In this paper there are presented the fabrication processes of microelement monolithic reservoirs using PS matrix; two impregnation processes of porous structure with iron ions or iron oxides have been studied: iron electrochemical deposition and iron salts deposition and melting, both followed by thermal treatments. The test structures were analyzed from morphological and compositional point of view and the measurements reveal that the iron compounds are distributed both inside the pores network and in the Si skeleton.
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