Abstract
Diamond-like carbon (a-C and a-C:H) and nitrogen-containing diamond-like carbon (a-C:N and a-C:N:H) films were deposited using ion-beam sputter deposition and r.f. plasma-enhanced chemical vapor deposition (PECVD) techniques, and studied by laser Raman spectroscopy. The Raman spectra were deconvoluted to D and G bands using lorentzian and gaussian line shapes. Both line shapes were found to produce consistent results. The Raman parameters, including the intensity ratios ( I(D)/ I(G)), band positions and bandwidths, were obtained. The Raman spectra of nitrogen-containing and nitrogen-free diamond-like carbon films were found to be different in terms of the Raman parameters. The differences originated from the incorporation of nitrogen itno diamond-like carbon. The Raman spectra of various carbons were also analyzed systematically.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.