Abstract
Diamond-like carbon (a-C and a-C:H) and nitrogen-containing diamond-like carbon (a-C:N and a-C:N:H) films were deposited using ion-beam sputter deposition and r.f. plasma-enhanced chemical vapor deposition (PECVD) techniques, and studied by laser Raman spectroscopy. The Raman spectra were deconvoluted to D and G bands using lorentzian and gaussian line shapes. Both line shapes were found to produce consistent results. The Raman parameters, including the intensity ratios ( I(D)/ I(G)), band positions and bandwidths, were obtained. The Raman spectra of nitrogen-containing and nitrogen-free diamond-like carbon films were found to be different in terms of the Raman parameters. The differences originated from the incorporation of nitrogen itno diamond-like carbon. The Raman spectra of various carbons were also analyzed systematically.
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