Abstract
Magnetron sputtering was used to obtain single-layer MoSi2, MoSiB and multilayer MoSiB/SiBC coatings. Coating structures were studied using X-ray phase analysis, scanning electron microscopy and glow discharge optical emission spectroscopy. Mechanical properties of the coatings were determined by nanoindentation. The coatings were tested for oxidation resistance and thermal stability at temperatures between 600 °С and 1200 °С. It was found that single-layer MoSiB coatings have a hardness of 27 GPa, elasticity modulus of 390 GPa and elastic recovery of 48 % and exhibit short-term oxidation resistance up to 1500 °С inclusive due to a SiO2-based protective film formed on their surfaces. MoSi2coatings have hardness comparable to that of MoSiB but slightly lower oxidation resistance. Multilayer MoSiB/SiBC coatings feature 23–27 GPa hardness and oxidation resistance limited to 1500 °С, but at the same time they have higher elastoplastic properties as compared to MoSiB.
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