Abstract
Single-layer MoSi2, MoSiB, and multilayer MoSiB/SiBC coatings are fabricated by magnetron sputtering. Coating structures are investigated using X-ray diffraction, a scanning electron microscopy, and glow-discharge optical emission spectroscopy. Mechanical properties of coatings are determined by nanoindentation. The thermal stability of coatings is studied in a temperature range of 600–1200°C and oxidation resistance is studied upon heating to 1500°C. It is established that single-layer MoSiB coatings possess a hardness of 27 GPa, elasticity modulus of 390 GPa, and elastic recovery of 48%. They can also resist oxidation up to 1500°C inclusively, which is caused by the formation of the SiO2-based protective film on their surface. The MoSi2 coatings can have hardness comparable to the hardness of MoSiB coatings, but they are somewhat worse than them in regards to oxidation resistance. Multilayer MoSiB/SiBC coatings have hardness 23–27 GPa and oxidation resistance restricted by 1500°C, but they herewith have higher elastoplastic properties when compared with MoSiB.
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