Investigation of the Si–B–C–N Thin Coatings Deposited Using Magnetron Sputtering of SiBC Targets

Abstract

Amorphous thin-film Si–B–C–(N) coatings are fabricated by magnetron sputtering of sintered Si–B–C targets. The coating structure is investigated using X-ray phase analysis, scanning and transmission electron microscopy, scanning probe microscopy, glow-discharge optical emission spectroscopy, and Raman spectroscopy. Mechanical and tribological properties of coatings are determined using nanoindentation, scratch testing, and pin-on-disc testing. The oxidation resistance of coatings is investigated in a temperature range of 1200–1600 °C. It is established that coatings of the optimal composition possess hardness of 20 GPa, elasticity modulus of 210 GPa, elastic recovery of 53 %, friction coefficient of 0,6 against cemented carbide ball, and oxidation resistance above 1200 °C due to the formation of the SiO2-based protective film on their surface. Coatings deposited by sputtering the target of the Si70B25C composition in Ar + 15%N2 medium showed oxidation resistance both under long-term heating at t = 1200 °C for 12 h and short-term heating at temperatures of 1400, 1500, and 1600 °C.