Structure design of micro touch sensor array

Abstract

Abstract The micro touch sensor array is fabricated by Ti substrate and PZT thin-film. PZT thin-film is synthesized by hydrothermal method and used as both micro sensor and micro actuator. Micro touch sensor array is not only simple to suit for miniaturization, but also robust against the disturbance. It will have numerous areas of application instead of conventional switch based on the mechanical contact. In this study, structure design of micro touch sensor array is presented. The main focus of structure design is on improving the sensitivity of micro touch sensor array. A mathematical model, which is used to optimize structure design of micro touch sensor array, is derived. According to cantilever beam theory, the frequency response to electric output of micro touch sensor unit has been discussed. The effects of changing physical parameters such as the location of the electrodes of PZT actuation and sense layer, and the length of the electrodes of PZT layers are studied. Based on the maximum output of micro touch sensor unit, the optimal structure has been obtained from both sides of analysis and experiment.