Dynamic analysis of micro touch sensor array synthesized by hydrothermal method

Abstract

We have fabricated a micro touch sensor array. Every touch sensor unit is composed of Ti substrate and PZT thin film. The PZT thin film was synthesized by a hydrothermal method and used as both micro sensor and micro actuator. The micro actuator is driven at the resonant frequency point of the structure. The impedance change can be detected before and after contact by the micro sensor. This micro touch sensor array can be used as the controlling touch sensor pad of a car instead of the conventional capacity type touch pad, because it can resist high temperature. In order to improve the property of the micro touch sensor, the mechanics model, which is used to analyze the relationship between the input voltage and output voltage, was set up. According to cantilever beam theory, the response of the micro touch sensor to electric input has been discussed. Based on the model, the structural characterization of the micro touch sensor has been evaluated. The parameters that affect the output voltage have been analyzed.