Abstract
In this paper, the mathematical model, which is used to optimize configuration of micro touch sensor array structure, is derived. The main focus is on improving the sensitivity of micro touch sensor array. The micro touch sensor array is fabricated by PZT thin film which is synthesized by hydrothermal method. According to cantilever beam theory, the frequency response of micro touch sensor unit to electric input has been discussed. The effects of changing physical parameters such as the location of the electrodes of PZT actuation and sense layer, and the length of the electrodes of PZT layers are studied. Based on the maximum output of micro touch sensor unit, the optimal structure has been obtained from both side of analysis and experiment.
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