Abstract
The author has analyzed the structure and properties of micro-particles, which are deposited from arc discharge plasma near the cathode on the substrate and walls of the vacuum chamber. Cathode was grade BT1.0 titanium spraying in nitrogen and acetylene. Particles and films formed in plasma flow with superposing of electric and magnetic fields. The dependence of physical properties of microparticles on the operation modes of the cathode pack has been analyzed. Possible mechanisms for forming fractal structures in vacuum arc discharge plasma have been considered.
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