Deposition of Aluminum Oxides From a Vacuum-Arc Discharge Plasma

Abstract

The physical and mechanical properties of ceramic coating based on aluminum oxide was study. For the investigation, aluminum oxide ceramic coating was applied on stainless steel samples from AISI 321. Microhardness, coating thickness, coating phase composition were investigated on the obtained samples. Results of researches expand knowledge about physical and mechanical properties of ceramic coverings of aluminum oxide deposited their plasma of vacuum arc discharge. Results of X-ray structure analysis have shown that aluminum deposition from vacuum arc discharge in oxygen environment produces coating consisting of $\gamma$ – Al2O3 and $\alpha$ – Al2O3 phase with predominance of $\gamma$ -phase. By results of the carried out researches it is established, that at increase in a bias voltage microhardness of received coverings raises from 600HV to 900HV it is supposedly connected with formation of a phase $\alpha$ – Al2O3.