Abstract

Thin films consisting of layers of Ag nanocrystals (NCs)embedded in amorphous Al2O3 were grown by pulsed laserdeposition. High-resolution electron microscopy was used tocharacterize the structure of the films. The growth kinetics of theNCs were studied by varying the Ag content of the films between 0.8and 12.4×1015 atoms cm-2 which produced NCs withaverage diameters of between 1.1 and 9.6 nm. At low Ag content theNCs have a spherical in-plane shape with a narrow size distributionbut they become more elongated with a broader size distribution asthe Ag content increases due to coarsening and coalescence of theNCs. Underneath each layer of NCs there is a continuous layer of whatis believed to be Ag implanted into the amorphous Al2O3 dueto the high kinetic energy, of the order of 100 eV, of the Ag speciesproduced during laser ablation.

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