Structural morphology and Mn distribution in annealed InP coimplanted with P and Mn

Abstract

We have studied the structural, chemical, and magnetic properties of InP following coimplantation with high energy P and Mn ions to fluences in excess of 1016 cm−2 and subsequent annealing above 600 °C. Rutherford backscattering spectrometry, x-ray diffraction, secondary ion mass spectrometer, and transmission electron microscopy measurements reveal that rapid thermal annealing causes only a partial epitaxial recrystallization of the layer amorphized by the implantations; the remaining region up to the surface crystallizes incoherently but retains most of the implanted Mn. Magnetic measurements demonstrate that fully three quarters of the Mn has been incorporated into MnP nanoparticles embedded into this polycrystalline InP region. The remaining Mn is most probably incorporated into the InP lattice but gives only a paramagnetic response that can be described by a simple Brillouin function at temperatures down to 5 K.