Abstract
In this research, effect of copper (Cu) doping on the structural, optical, morphological and electrical characteristics of diamond like carbon (DLC) thin films have been investigated. Thin films of DLC and Cu doped DLC (Cu-DLC) have been deposited on glass substrates by pulsed Laser Deposition (PLD) technique. XRD results showed that at 1.5% of Cu doping, Cu form cluster in DLC. Below of this doping ratio, Cu has amorphous form in DLC. AFM reveals that the minimum surface roughness was observed for the 1.0% DLC thin film with the root mean square surface roughness (Rrms) of 2.07. The Rrms values for the 1.5%, 2.0% and 2.5% Cu-DLC thin films are 2.45, 3.14 and 3.89 respectively. The average sheet resistivity of films is decreased by increasing the Cu concentration, according to Four Point Probe technique.
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