Abstract
Our previous work demonstrated the advantages of MEMS vibratory gyroscopes with 1 degree of freedom (DOF) drive and 2-DOF sense modes which were shown to be robust to temperature drifts. These devices were designed with frequencies below 1 kHz; many applications, however, require gyroscopes with operational frequencies above 1 kHz for the rejection of ambient vibrations. This paper discusses the design trade-offs associated with increasing the frequency of the 3-DOF gyroscope design concept. Lumped parameter models were used to simulate the effects of frequency increases on the device, focusing on the 2-DOF sense mode. The simulations showed that the sense mode peak spacing increases with frequency which ultimately causes a decrease in sensitivity. A series of 3-DOF gyroscope prototypes with diferent operational frequencies ranging from 0.7 kHz to 5.1 kHz were designed, fabricated, and characterized.
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