Abstract
Firstly, we describe a method to improve the thickness uniformity of thin films. Then epitaxial KT 0.5 Nb 0.5 O 3 films were obtained on MgO and LaAlO 3 substrates, whereas films on sapphire are textured. Secondly, we determine numerically the tunability at 10 GHz of different transmission lines printed on a ferroelectric film deposited on sapphire. The ferroelectric film permittivity was varied from 700 to 500. Uniplanar lines (coplanar waveguide and coplanar strips) have a higher tunability (16%) than microstrip lines (2%). Moreover, the definition of a figure of merit, compromise in terms of tunability and insertion loss, shows that the coplanar strips exhibit the best performance.
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