Abstract
An active matrix‐type stretchable display is realized by overlay‐aligned transfer of inorganic light‐emitting diode (LED) and single‐crystal Si thin film transistor (TFT) with roll processes. The roll‐based transfer enables integration of heterogeneous thin film devices on a rubber substrate while preserving excellent electrical and optical properties of these devices, comparable to their bulk properties. The electron mobility of the integrated Si‐TFT is over 700 cm2V−1s−1, and this is attributed to the good interface between the Si channel and the thermally grown SiO2insulator. The light emission properties of the LED are of wafer quality. The resulting display stably operates under tensile strains up to 40%, over 200 cycles, demonstrating the potential of stretchable displays based on inorganic materials.
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