Stimulated structural transformations in amorphous semiconductor multilayers

Abstract

Structural transformations, stimulated by illumination or heating are related to the interdiffusion processes in nanolayered structures, which were prepared by cyclic thermal evaporation or magnetron sputtering from Si, Ge, Se semiconductors and some As2S3, SexTe1–x-type chalcogenide glasses. It is shown that the intermixing velocity and the related changes of optical parameters depend on the period of the multilayer and intensity of illumination. Volume extension can be stimulated at the illuminated regions and used for the surface relief formation.