Abstract
The correlation between step velocity and carbon incorporation during the step-flow growth of GaN was analyzed from the standpoints of the meantime until a carbon atom incorporated at the kink site moves through the step-edge site to the surface site, τ, and the length of time before the carbon concentration at the step-edge site reaches its equilibrium value, τstep. Reported step-velocity dependences of carbon concentration in GaN were successfully reproduced with the assumption of τ ≫ τstep or τ < τstep. Due to the difficulty in estimating τstep, additional experiments are needed to tell which segregation is dominant for carbon in GaN.
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