Static SIMS, FABMS and SIMS imaging in applied surface analysis

Abstract

Static secondary ion mass spectrometry (SSIMS) and fast atom bombardment mass spectrometry (FABMS) promise to become valuable additions to the range of surface analysis techniques, such as AES and ESCA, already available to the materials scientist. SSIMS and FABMS are sensitive to the uppermost surface layer, provide routine elemental analysis down to the parts per million level and furnish a ‘mass spectrum’ of the surface which reflects its chemical structure. Recent advances in ion gun technology, utilising liquid metal sources, now provide the ability to ‘image’ small features on a surface with spatial resolutions of <1 µm. In this way chemical maps of surfaces can be produced that give a detailed insight into elemental or molecular distribution at the surface. The application of these techniques to practical surface problems in the areas of polymers, glasses and catalyst technology is described.