State-of-the-Art Clean Room—Vital Issues

Abstract

This paper presents a comprehensive review of leading edge technological changes that have occured in cleanroom design practices. The quest for submicron facility and changing standards have necessitated the emergence of “World Class” or Class 1 clean-rooms.Primary issue in the clean room construction viz, configuration, air supply and return strategies, fluid Alteration and base building design are discussed in detail.Laying out a cleanroom presents multiple challenges. These challenges call for innovative layout concepts such as efficiency oriented design, automatic process equipment installation and SMIF design. These concepts are described and a novel circular fab concept is also presented.Maintenance of stringent clean room ambient is driving technologies for improved particulate monitoring and control. Use of concepts of Laser and CNC for particle monitoring and emergence of ULPA as prime filteration technique, are elaborated upon.Supporting utility systems such as piping and safe disposal of proces...