Abstract
Sputtering of nominal 2 μg/cm 2 carbon foils by 20 keV and 40 keV Ar + bombardment has been measured using thickness measurements derived from the angular scatter distribution of 2 keV protons transiting the foils. The total sputtering yield is observed to reach a constant rate of 3.5 atoms removed per incident Ar + and is independent of both the foil thickness and the incident energy. This is attributed to a nearly constant deposited energy density at the entrance and exit surfaces, which results from a nuclear stopping power that varies little over the energy range of 6–40 keV. By extrapolating measured backsputtering yield data to the energies used in this study, we obtain a transmission sputtering yield of approximately 1.7. Holes were also formed in the foil, and the fraction of holes created by Ar + bombardment linearly increases with increasing fluence above a threshold fluence of 4.5 × 10 15 Ar +/cm 2.
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