Spurious-free Lamb wave resonators with protrusion structures

Abstract

In this letter, we demonstrate a technique to eliminate the spurious modes in aluminum nitride Lamb wave resonators (LWRs). The transverse acoustic wave characteristics are examined, and a resonance modulation theory on the regulation of mechanical boundary conditions is deducted. As examples of embodiments, vertical and lateral protrusion structures are proposed for the suppression. Finite element analysis verifies that the employment of these structures effectively restrains the transverse modes, and the measured electrical performance of the LWR with protrusions demonstrates an 11 dB reduction in the spurious response.