Abstract
This paper reports on the design, fabrication, and testing of a novel spring-loaded DC-contact RF MEMS switch. Although the switch is electrostatically actuated, the on-state metal-to-metal contact is achieved through a stress-induced force. Detailed theoretical and experimental data for estimating the contact force are presented. The measured switches demonstrate an average on-state RF contact resistance of 0.5Ω and an off-state capacitance of 10 fF with an average actuation voltage of 55 V. These results demonstrate the potential of stress-originated forces for developing low-power DC-contact RF MEMS switches. © 2004 Wiley Periodicals, Inc. Int J RF and Microwave CAE 14: 345–355, 2004.
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