Abstract
Spontaneously detaching self-standing diamond films were successfully fabricated using saturated hydrocarbon polymers as seeding source by hot filament chemical vapor deposition (HFCVD) technique. X-ray diffraction confirmed the crystal structure of diamond. The microcrystalline morphology of the diamond films was analyzed by atomic force microscopy (AFM) and scanning electron microscopy. Raman spectra from the front and back sides of the films show the characteristic diamond band at 1332 cm − 1 and no carbide layer. EELS spectra also show the signature features of diamond. The use of hydrocarbon polymers as seeding source will improve the cost-effectiveness of the fabrication of diamond wafers by simplifying the fabrication process.
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