Split-Post and Split-Cylinder Resonator Techniques: A Comparison of Complex Permittivity Measurement of Dielectric Substrates

Abstract

We provide an overview of two nondestructive techniques, the split-post and split-cylinder resonator, which are under consideration as standard test methods for measuring the relative permittivity and loss tangent of bare low-temperature cofired ceramic (LTCC) substrates over the frequency range of 1–30 GHz. The capabilities and limitations of the split-post and split-cylinder resonator are outlined, and the level of agreement between the two techniques is examined through comparison of the relative permittivity and loss tangent measurements of a fused silica and an LTCC substrate.