Abstract
Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
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https://doi.org/10.4028/www.scientific.net/msf.264-268.635
Journal: Materials Science Forum | Publication Date: Feb 1, 1998 |
Citations: 4 |
Spatial Uniformity of the Mechanical Properties of 3C-SiC Films Grown on 4-Inch Si Wafers as a Function of Film Growth Conditions
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