Abstract
The spatial resolution of dielectric measurement using a non-contact microwave probe was improved the basis of Kirchhoff's diffraction formula with decreasing diameters of the coaxial cable and probe. Using reflection intensity mappings, the dielectric permittivity distribution in micro-region at 9.4 GHz was measured for the cross section of a multi-layer ceramic capacitor at room temperature. The spatial resolution was experimentally estimated to be about 10 µm from mappings of the dielectric and inner electrode layers in the multi-layer ceramic capacitor.
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