Spatial Resolution for Dielectric Measurement Using Non-Contact Microwave Probe and In-Plane Dielectric Mappings for Dielectric Device

Abstract

The spatial resolution of dielectric measurement using a non-contact microwave probe was improved the basis of Kirchhoff's diffraction formula with decreasing diameters of the coaxial cable and probe. Using reflection intensity mappings, the dielectric permittivity distribution in micro-region at 9.4 GHz was measured for the cross section of a multi-layer ceramic capacitor at room temperature. The spatial resolution was experimentally estimated to be about 10 µm from mappings of the dielectric and inner electrode layers in the multi-layer ceramic capacitor.