Abstract
The dielectric measurement for microscopic area of multi-layer ceramics capacitor was carried out by microwave microscope using non-contact microwave probe. The phase of incidence microwave for sample was fixed to pi/2 in order to realize accurate measurement of sample. The spatial resolution for dielectric measurement was increased based on Kirchhoff's diffraction theory with decreasing coaxial cable and probe diameter. From reflection intensity mapping, the dielectric permittivity distribution in microscopic area at GHz order was measured for cross section of multi-layer ceramics capacitor at room temperature. The spatial resolution was experimentally estimated to be about 10 mum from mapping of cross section view of dielectric and inner electrode layers in multi layer ceramics capacitor.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
