Spatial distributions of plasma parameters in conventional magnetron discharges in presence of nanoparticles

Abstract

Two-dimensional spatial measurements of magnetic field and plasma parameters have been performed in conventional magnetron DC discharges during the formation of metallic nanoparticles. Correlations between the electron density and temperature distributions, and the magnetic field geometry and strength have been established. A sharp increase of the plasma potential is found on the edge of the last magnetic arch followed by a decrease towards the anode plate and edges. It is shown that the spatial variation of the plasma potential is at the origin of a potential well that can trap negatively charged nanoparticles.