Abstract
The present work intends to study of dc glow discharge were generated between pin (cathode) and a plate (anode) in Ar gas is performed using COMSOL were used to study electric field distribution along the axis of the discharge and also the distribution of electron density and electron temperature at constant pressure (P=.0.0mbar) and inter electrode distance (d=4 cm) at different applied voltage for both pin cathode system and plate anode and comparison with experimental results.
Highlights
The miniaturization of plasma discharges has been studied for the development of novel applications, such as plasma display panels [1, 2], materials processing [3, 4] and analytical instrumentation [5, 6]
The plasma discharge is generally maintained at a low pressure
The transition to a sub-normal glow discharge and to a normal glow discharge is marked by a decrease in the voltage and an increase in the current [8]
Summary
The miniaturization of plasma discharges has been studied for the development of novel applications, such as plasma display panels [1, 2], materials processing [3, 4] and analytical instrumentation [5, 6]. In such applications, the plasma discharge is generally maintained at a low pressure. Approximate solution can be satisfied by making finite element simulation using deferential equations that describe plasma energy and species transport [9]. COMSOL Multiphysics software based to make simulation identical with experimental based on fluid model with drift-diffusion approximation
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