Abstract
Depth and lateral-spread distributions of defects generated by 0.5-5 keV argon beam in crystalline nickel has been determined by using the computer simulation program MARLOWE. Over the whole energy range, vacancies are well separated from the interstitials and the formation of depleted zones is clearly indicated. Densities of defects and deposited energy are evaluated and the dependence of defect configurations on some lattice parameters is discussed.
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