Abstract
Pre-production models of excilamps developed in the laboratory of optical radiation are described; main characteristics of radiators and their power supplies, portable UV-excilamps of the barrier or capacitive discharges, and also powerful VUV-excilamps of the barrier discharge which can be used for cleaning or modifying material surfaces are presented.
Full Text
Paper version not known (
Free)
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call