Abstract
The emission from the plasma of a contracted longitudinal dc discharge in a He/CF2Cl2 mixture in the wavelength range 130–300 nm is investigated. It is shown that the discharge plasma emits within the range 150–260 nm. The emission consists mainly of the broad bands of Cl2 molecules and single-charged chlorine ions. The pressure and composition of the working mixtures, the discharge current, and the time during which the emitter can operate on a single gas fill are optimized to attain the best characteristics of UV and VUV radiation. The results obtained are of interest for developing a steady-state source of VUV and UV radiation to be applied in microelectronics, photochemistry, and medicine.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
