Abstract
The paper studies the kinetic equation forelectron transport in semiconductors.New formulas for the heat generation rate are derivedby analyzing the basic scattering mechanisms.In addition, properties of thesteady state distribution are discussed and possibleextensions of the deviational particle Monte Carlo methodto the area of electron transport are proposed.
Highlights
Kinetic theory is a common tool for modelling charge transport in semiconductors ([6, 10, 8])
The continued miniaturization of semiconductor devices leads to new challenges related to heat generation ([20, 12, 11, 16])
The purpose of this paper is to contribute to the study of heat generation in semiconductor devices
Summary
Kinetic theory is a common tool for modelling charge transport in semiconductors ([6, 10, 8]). The direct simulation Monte Carlo (DSMC) method for the Boltzmann transport equation has been extended to cover the generation and distribution of heat in the device. The purpose of this paper is to contribute to the study of heat generation in semiconductor devices. New formulas for the heat generation rate are derived from the kinetic equation by analyzing the scattering mechanisms.
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