Abstract
A series of FeCoBNi–Al 2O 3 films were fabricated on glass and polymer substrates by means of RF magnetron co-sputtering. Firstly, the FeCoB films with Al 2O 3 addition were investigated. To further improve the microwave characteristics of the films, the effects of the Ni content on the soft magnetic properties and microwave characteristics of (Fe 40Co 40B 20) 97− x Ni x –(Al 2O 3) 3 films were studied. As a consequence (Fe 40Co 40B 20) 97–(Al 2O 3) 3 films doped with 28.64 at.% of Ni exhibit excellent properties with high saturation magnetization (4 πM s ) of 1.67 T, high resonant frequency ( f r ) of 2.58 GHz, high electrical resistivity ( ρ) of 235.85 μΩ cm and the real part of permeability is about 300, which is maintained up to 2 GHz. These results show that the presented films possesses potential in designing micro-magnetic devices design for Monolithic Microwave Integrated Circuit (MMIC).
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