Abstract
In this report we present the results of the study of the influence of the parameters of SnO 2 thin films on their basic gas sensitive characteristics such as kinetics and absolute gas sensitivity. We have particularly investigated the influence of the film thickness, structure, concentration of charge carriers, and presence of uncontrolled impurities in the SnO 2 films, which were deposited by spray pyrolysis method. Based on experimental results, the important parameters such as deposition conditions, film thickness and metal-type doping level leading to best exploitation parameters of thin film gas sensors could be optimized.
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