Processes development for low cost and low power consuming SnO 2 thin film gas sensors (TFGS)

Abstract

In this report results of investigations aimed at the design of topology and manufacturing technology of SnO 2 gas sensitive thin films and low cost gas sensors with low power consuming and high gas sensitivity are presented. The requirements for the parameters of gas sensitive thin films have been formulated. Gas sensitive properties of SnO 2 thin films deposited by spray pyrolysis method from alcohol and water solutions are discussed. The simple construction of the gas sensitive chip of TFGS have been described and low cost technology for its realization have been proposed. Operation parameters of the created TFGS have demonstrated the efficiency of proposed decisions. Manufactured low cost TFGS had high sensitivity to various gases such as CO, CH 4 and H 2 ( γ to 10 3 and more) and low consuming power (50–100 mW).