Site-controlled growth of Ge nanostructures on Si(100) via pulsed laser deposition nanostenciling

Abstract

The authors combine nanostenciling and pulsed laser deposition to pattern germanium (Ge) nanostructures into desired architectures. They have analyzed the evolution of the Ge morphology with coverage. Following the formation of a wetting layer within each area defined by the stencil’s apertures, Ge growth becomes three dimensional and the size and number of Ge nanocrystals evolve with coverage. Micro-Raman spectroscopy shows that the deposits are crystalline and epitaxial. This approach is promising for the parallel patterning of semiconductor nanostructures for optoelectronic applications.