Abstract
We report on the fabrication of planar and channel single mode waveguide operating at infrared-fiber band in ZnSe single crystal by using 6.0 MeV C and O ion implantation and standard lithography technique. The effective refractive indices of the planar waveguide mode at 1539 nm is recorded using the prism-coupling method at the dark environment. Near field intensity distributions of the single mode in ZnSe single crystal waveguide at 1539 nm are measured by an end-face coupling system and reconstructed by the finite difference beam propagation method, respectively. Micro-Raman spectrometry is used to analyze microstructural changes of the substrate and waveguide structure.
Published Version
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