Planar and channel waveguides in fused silica fabricated by multi-energy C ion in the visible and near-infrared band

Abstract

Fused quartz is a key material in fabrication of integrated devices, which transmits extends from ultraviolet to infrared. We report the fabrication of planar and channel waveguides in fused quartz using multi-energy C ion at energies of (5+5.5+6)MeV and fluences of (1+1+1.5)×1015ions/cm2. The guiding modes at the wavelength of 633nm (He–Ne laser) and 1539nm (diode laser) were detected using the prism-coupling method, and the modes were stable after annealing in air. The refractive index profiles of planar and channel waveguides at the wavelength of 633nm and 1539nm were typical “well+barrier” distributions, which were reconstructed using the reflectivity calculation method (RCM) software and intensity calculation method (ICM), respectively. For comparison to the experimental results, the finite difference beam propagation method (FD-BPM) was used to simulate the guiding modes of the waveguides. We measured the near-field intensity distributions for the visible (633nm) and near-infrared (1300nm, 1539nm and 1620nm) wavelength regions, suggesting that the modes can be effective transmission in the wavelength range for optical fiber communications.