Single-electron effects in heavily doped polycrystalline silicon nanowires

Abstract

We have observed single-electron charging effects in heavily doped polycrystalline silicon nanowires at 4.2 K. Wires of approximately 20 nm by 30 nm active cross section were defined by electron-beam lithography and thermal oxidation in standard polycrystalline silicon material. We have measured a Coulomb staircase and periodic current oscillations with gate bias, attributed to localized carrier confinement resulting from a statistical variation in the intergrain tunnel barriers. A sharp change in the current oscillation period is seen and we speculate that it is due to electrostatic screening of the gate bias by grain boundary defect states.