Simultaneous measurement of spectral optical properties and thickness of an absorbing thin film on a substrate

Abstract

This paper describes a technique and also illustrates an application of the technique for simultaneously measuring both the spectral complex refractive index ( n 1, k 1) and the thickness d 1 of an absorbing thin solid layer on a thick substrate. The contours of constant reflectance R and transmittance T in the ( n 1, k 1), ( n 1, d 1) and ( k 1, d 1) planes are examined for a thin layer on a substrate, which is exposed to oblique unpolarized incidence, under various conditions in order to facilitate an optimal choice of the combination of measured quantities for the inverse estimation of parameters. Theoretical analysis illustrates that optimal choices would include measurement of R at a large angle of incidence, combined with measurements of normal T and near normal R so as to reduce erroneous solutions or nonconvergence. And any additional measurement R at any angle of incidence may be used to prevent the multiple solutions. For the inverse estimation of parameters, we also present a technique in association of the least squares method to extract the thickness and optical constants characterizing the thin absorbing film from measurements of R and T. The method is then applied for experimental measurement of the optical properties and thickness of a polyvinylalcohol (PVA) film placed upon a substrate of ZnSe. These results provide useful information for analyses on the applications of PVA in textile sizing, adhesives, polymerization stabilizers, and paper coating.