Abstract
A simulation algorithm that generates x-ray emission spectra of samples irradiated with kilovolt electron beams was developed. The algorithm is based on a Monte Carlo package which performs simulations of both electron and photon transport for arbitrary materials and geometries. The code uses semi-empirical ionization cross-sections obtained from an optical data model and a simple model to describe the angular distribution of bremsstrahlung photons. The simulation efficiency is optimized by the use of a variance reduction technique. The reliability of the simulation code was analyzed by comparing the results with electron probe measurements for different specimens and measurement conditions, including thin films and oblique incidence. In general, there was good agreement between the simulation results and experiences. Copyright © 1998 John Wiley & Sons, Ltd.
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