Abstract
A theoretical and computational model has been proposed to study the characteristics of electron distribution features in the ionization process of the argon electron cyclotron resonance microwave discharge. A quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method is used. The elastic, excitation, ionizing electron-neutral collisions and elastic, charge exchange ion-neutral collisions are taken into account. The detailed information about the distributions of electron and electromagnetic fields are obtained, and the influence of neutral pressures on the electron energy distribution is also involved.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
