PIC/MCC mode simulation of electron cyclotron resonance discharge

Abstract

A quasi three-dimensional particle in-cell combined on Monte Carlo collision method(PIC/MCC) was adopted to simulate the ionization process in electron cyclotron resonance(ECR) discharge in this paper. For one thing, Using a electromagnetic model of PIC method to show the process of charged particles interact with the microwave. On the other hand, the collision between particles are described by the method of MCC. The collision types in the model are as follows, including the elastic collision, excitation process and ionization process between electrons and neutral particles. In addition, the charge-exchange collision and elastic collision between electrons and neutral particles, the change of collision cross section with electron energy are also been considered. A distribution of electromagnetic field in discharge channel and electron in phase space are given by simulation results. According to the analysis of the distribution evolution over time, ECR heating always occured in the area of ω≈ωc0 and perpendicular to the axis. In the ECR region, almost all the energy of microwave have coupled to the electrons and accelerated electrons. And a large number of chared particles have been produced by the ionization process of electrons collision with neutral particles. As the discharge, the distrubtion of electrons from anisotropy tends to the isotropy.