Abstract
A technique is presented for the analysis of digitally recorded capacitance transients in order to determine the energy and capture cross section of deep levels. The method is essentially a digital simulation of the measurement carried out by a lock-in amplifier. This technique in principle allows trap parameters to be determined in a single temperature scan. The more efficient use of data brought about by the method permits a detailed study of the Arrhenius plot and in particular gives insight into cases where the capacitance transient is nonexponential. The method may be adapted to allow more efficient data usage in conventional lock-in amplifier deep level transient spectroscopy.
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