Abstract

4H-SiC junction-gated and metal-oxide-semiconductor field effect transistors (JMOSFETs) have been fabricated for high temperature stable circuit operation. The JMOSFETs have shown the feasibility for operating with constant on and off current levels from room temperature up to 300 degreesC. Moreover, by accumulating the channel using the MOS gate, over 2.5 times higher current density than normal JFET operation has been achieved. The temperature dependent I-V and the sub-threshold characteristics have been studied by using 2-dimensional simulation.

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